Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635889 | Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof | Mitsukuni Tsukihara, Mitsuaki Kabasawa, Yuji Takahashi | 2003-10-21 |
| 6573517 | Ion implantation apparatus | Mitsukuni Tsukihara, Yoshitomo Hidaka, Mitsuaki Kabasawa, Kouji Inada | 2003-06-03 |