Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563106 | Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same | John E. Bowers, Roger Helkey, Robert Kehl Sink, Seung-bok LEE, Noel C. MacDonald | 2003-05-13 |