Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6628041 | Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same | Seung-bok LEE | 2003-09-30 |
| 6563106 | Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same | John E. Bowers, Roger Helkey, Charles M. Corbalis, Robert Kehl Sink, Seung-bok LEE | 2003-05-13 |
| 6541831 | Single crystal silicon micromirror and array | Seung-bok LEE | 2003-04-01 |