Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563106 | Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same | John E. Bowers, Roger Helkey, Charles M. Corbalis, Seung-bok LEE, Noel C. MacDonald | 2003-05-13 |
| 6560384 | Optical switch having mirrors arranged to accommodate freedom of movement | Roger Helkey, Herbert Paul Koenig, John E. Bowers | 2003-05-06 |
| 6504967 | Passive alignment method and apparatus for fabricating a MEMS device | Ping Zhou | 2003-01-07 |