Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6629874 | Feature height measurement during CMP | — | 2003-10-07 |
| 6602121 | Pad support apparatus for chemical mechanical planarization | — | 2003-08-05 |
| 6551179 | Hard polishing pad for chemical mechanical planarization | — | 2003-04-22 |
| 6547651 | Subaperture chemical mechanical planarization with polishing pad conditioning | John M. Boyd, Michael S. Lacy | 2003-04-15 |
| 6527621 | Pad retrieval apparatus for chemical mechanical planarization | — | 2003-03-04 |
| 6520843 | High planarity chemical mechanical planarization | — | 2003-02-18 |
| 6517419 | Shaping polishing pad for small head chemical mechanical planarization | — | 2003-02-11 |
| 6514129 | Multi-action chemical mechanical planarization device and method | — | 2003-02-04 |
| 6514121 | Polishing chemical delivery for small head chemical mechanical planarization | — | 2003-02-04 |
| 6511368 | Spherical drive assembly for chemical mechanical planarization | — | 2003-01-28 |