Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6609961 | Chemical mechanical planarization belt assembly and method of assembly | John M. Boyd | 2003-08-26 |
| 6599765 | Apparatus and method for providing a signal port in a polishing pad for optical endpoint detection | John M. Boyd | 2003-07-29 |
| 6554688 | Method and apparatus for conditioning a polishing pad with sonic energy | — | 2003-04-29 |
| 6547651 | Subaperture chemical mechanical planarization with polishing pad conditioning | John M. Boyd, David G. Halley | 2003-04-15 |