Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565822 | Epitaxial silicon wafer, method for producing the same and subtrate for epitaxial silicon wafer | Ryoji Hoshi, Masahiro Sakurada, Tomohiko Ohta, Izumi Fusegawa | 2003-05-20 |
| 6506251 | Method for producing silicon single crystal | Koji Kitagawa | 2003-01-14 |