Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565822 | Epitaxial silicon wafer, method for producing the same and subtrate for epitaxial silicon wafer | Ryoji Hoshi, Susumu Sonokawa, Tomohiko Ohta, Izumi Fusegawa | 2003-05-20 |