Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632280 | Apparatus for growing single crystal, method for producing single crystal utilizing the apparatus and single crystal | Koji Kitagawa, Izumi Fusegawa, Tomohiko Ohta | 2003-10-14 |
| 6632411 | Silicon wafer and method for producing silicon single crystal | Izumi Fusegawa, Tomohiko Ohta, Shigemaru Maeda | 2003-10-14 |
| 6592662 | Method for preparing silicon single crystal and silicon single crystal | Izumi Fusegawa, Kouichi Inokoshi, Tomohiko Ohta | 2003-07-15 |
| 6565822 | Epitaxial silicon wafer, method for producing the same and subtrate for epitaxial silicon wafer | Susumu Sonokawa, Masahiro Sakurada, Tomohiko Ohta, Izumi Fusegawa | 2003-05-20 |