Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663964 | Heat dissipating structure | Kunihiko Mita, Akio Suzuki | 2003-12-16 |
| 6563195 | Wafer support having a dustproof covering film | Kazuhiko Tomaru, Ryuichi Handa | 2003-05-13 |
| 6545267 | Wafer holder of ion implantation apparatus | Ryuichi Miura, Kazuhiko Tomaru, Ryuichi Handa | 2003-04-08 |