Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563195 | Wafer support having a dustproof covering film | Tsutomu Yoneyama, Ryuichi Handa | 2003-05-13 |
| 6545267 | Wafer holder of ion implantation apparatus | Ryuichi Miura, Tsutomu Yoneyama, Ryuichi Handa | 2003-04-08 |