Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617594 | Method and device for ion implanting | Yoshihiko Fujiki, Yasuhiko Matsunaga | 2003-09-09 |
| 6545267 | Wafer holder of ion implantation apparatus | Kazuhiko Tomaru, Tsutomu Yoneyama, Ryuichi Handa | 2003-04-08 |