Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666922 | System for processing a workpiece | Raymon F. Thompson | 2003-12-23 |
| 6660098 | System for processing a workpiece | Raymon F. Thompson | 2003-12-09 |
| 6652219 | Semiconductor wafer processing apparatus having improved wafer input/output handling system | Jeffry Davis, Kert Dolechek | 2003-11-25 |
| 6632292 | Selective treatment of microelectronic workpiece surfaces | Brian Aegerter, Curt Dundas, Tom Ritzdorf, Michael Jolley | 2003-10-14 |
| 6622737 | Micro-environment chamber and system for rinsing and drying a semiconductor workpiece | Raymon F. Thompson | 2003-09-23 |
| 6599075 | Semiconductor wafer processing apparatus | Jeffry Davis, Kert Dolechek | 2003-07-29 |
| 6558470 | Reactor for processing a microelectronic workpiece | Raymon F. Thompson | 2003-05-06 |