Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666922 | System for processing a workpiece | Gary L. Curtis | 2003-12-23 |
| 6660098 | System for processing a workpiece | Gary L. Curtis | 2003-12-09 |
| 6660104 | Dual cassette centrifugal processor | Clif Neil | 2003-12-09 |
| 6622737 | Micro-environment chamber and system for rinsing and drying a semiconductor workpiece | Gary L. Curtis | 2003-09-23 |
| 6558470 | Reactor for processing a microelectronic workpiece | Gary L. Curtis | 2003-05-06 |