Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652219 | Semiconductor wafer processing apparatus having improved wafer input/output handling system | Kert Dolechek, Gary L. Curtis | 2003-11-25 |
| 6599075 | Semiconductor wafer processing apparatus | Kert Dolechek, Gary L. Curtis | 2003-07-29 |
| 6575689 | Automated semiconductor immersion processing system | Randy Harris, David Peterson | 2003-06-10 |
| 6572320 | Robot for handling workpieces in an automated processing system | — | 2003-06-03 |
| 6536131 | Wafer handling system | — | 2003-03-25 |