Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650204 | Resonator frequency correction by modifying support structures | Qing Ma, Valluri Rao | 2003-11-18 |
| 6630871 | Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator | Qing Ma | 2003-10-07 |
| 6621137 | MEMS device integrated chip package, and method of making same | Qing Ma, Valluri Rao | 2003-09-16 |
| 6600389 | Tapered structures for generating a set of resonators with systematic resonant frequencies | Qing Ma | 2003-07-29 |
| 6596609 | Method of fabricating a feature in an integrated circuit using two edge definition layers and a spacer | Brian S. Doyle | 2003-07-22 |
| 6593672 | MEMS-switched stepped variable capacitor and method of making same | Qing Ma, Valluri Rao | 2003-07-15 |
| 6573822 | Tunable inductor using microelectromechanical switches | Qing Ma, Valluri Rao | 2003-06-03 |
| 6570468 | Resonator frequency correction by modifying support structures | Qing Ma, Valluri Rao | 2003-05-27 |
| 6570220 | Fabrication of deep submicron structures and quantum wire transistors using hard-mask transistor width definition | Brian S. Doyle | 2003-05-27 |
| 6528856 | High dielectric constant metal oxide gate dielectrics | Gang Bai, David B. Fraser, Brian S. Doyle, Chunlin Liang | 2003-03-04 |