Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662419 | Method for fabricating film bulk acoustic resonators to achieve high-Q and low loss | Li-Peng Wang, Qing Ma | 2003-12-16 |
| 6650204 | Resonator frequency correction by modifying support structures | Qing Ma, Peng Cheng | 2003-11-18 |
| 6621022 | Reliable opposing contact structure | Qing Ma, Kramadhati V. Ravi | 2003-09-16 |
| 6621137 | MEMS device integrated chip package, and method of making same | Qing Ma, Peng Cheng | 2003-09-16 |
| 6593672 | MEMS-switched stepped variable capacitor and method of making same | Qing Ma, Peng Cheng | 2003-07-15 |
| 6587605 | Method and apparatus for providing optical interconnection | Mario Paniccia, Michael T. Morse | 2003-07-01 |
| 6573822 | Tunable inductor using microelectromechanical switches | Qing Ma, Peng Cheng | 2003-06-03 |
| 6570468 | Resonator frequency correction by modifying support structures | Qing Ma, Peng Cheng | 2003-05-27 |