Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662419 | Method for fabricating film bulk acoustic resonators to achieve high-Q and low loss | Qing Ma, Valluri Rao | 2003-12-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662419 | Method for fabricating film bulk acoustic resonators to achieve high-Q and low loss | Qing Ma, Valluri Rao | 2003-12-16 |