Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6629461 | Biased rotatable combdrive actuator methods | Satinderpall S. Pannu | 2003-10-07 |
| 6612029 | Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods | Satinderpall S. Pannu | 2003-09-02 |
| 6593677 | Biased rotatable combdrive devices and methods | Satinderpall S. Pannu | 2003-07-15 |
| 6586841 | Mechanical landing pad formed on the underside of a MEMS device | Michael Julian Daneman, Meng-Hsiung Kiang | 2003-07-01 |
| 6528887 | Conductive equipotential landing pads formed on the underside of a MEMS device | Michael Julian Daneman | 2003-03-04 |