Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586841 | Mechanical landing pad formed on the underside of a MEMS device | Behrang Behin, Meng-Hsiung Kiang | 2003-07-01 |
| 6528887 | Conductive equipotential landing pads formed on the underside of a MEMS device | Behrang Behin | 2003-03-04 |
| 6514781 | Maintaining the state of a MEMS device in the event of a power failure | Mark Chang, Scott Dalton, Timothy Beerling, Stephen Panyko, Gary M. Zalewski | 2003-02-04 |