Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6629461 | Biased rotatable combdrive actuator methods | Behrang Behin | 2003-10-07 |
| 6612029 | Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods | Behrang Behin | 2003-09-02 |
| 6593677 | Biased rotatable combdrive devices and methods | Behrang Behin | 2003-07-15 |