Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6506662 | Method for forming an SOI substrate by use of a plasma ion irradiation | Atsushi Ogura, Akira Doi, Masayasu Tanjyo | 2003-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6506662 | Method for forming an SOI substrate by use of a plasma ion irradiation | Atsushi Ogura, Akira Doi, Masayasu Tanjyo | 2003-01-14 |