Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6548379 | SOI substrate and method for manufacturing the same | — | 2003-04-15 |
| 6506662 | Method for forming an SOI substrate by use of a plasma ion irradiation | Youichirou Numasawa, Akira Doi, Masayasu Tanjyo | 2003-01-14 |