Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6564744 | Plasma CVD method and apparatus | Takahiro Nakahigashi, Yoshihiro Izumi, Hajime Kuwahara | 2003-05-20 |
| 6506662 | Method for forming an SOI substrate by use of a plasma ion irradiation | Atsushi Ogura, Youichirou Numasawa, Masayasu Tanjyo | 2003-01-14 |