Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671059 | Method and system for determining a thickness of a layer | Larry E. Frisa | 2003-12-30 |
| 6663340 | Wafer carrier transport system for tool bays | Jason Zeakes, Clinton Haris, William M. Hiatt | 2003-12-16 |
| 6650135 | Measurement chuck having piezoelectric elements and method | John Maltabes, Alain Charles | 2003-11-18 |
| 6620563 | Lithography method for forming semiconductor devices on a wafer utilizing atomic force microscopy | John Maltabes, Alain Charles | 2003-09-16 |
| 6593254 | Method for clamping a semiconductor device in a manufacturing process | Manfred Kraxenberger, Ines Thümmel, Bruno Spuler, Thorsten Schedel | 2003-07-15 |
| 6589099 | Method for chemical mechanical polishing (CMP) with altering the concentration of oxidizing agent in slurry | David Weston Haggart, Jr., John Maltabes | 2003-07-08 |