Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650135 | Measurement chuck having piezoelectric elements and method | Karl Mautz, John Maltabes | 2003-11-18 |
| 6620563 | Lithography method for forming semiconductor devices on a wafer utilizing atomic force microscopy | John Maltabes, Karl Mautz | 2003-09-16 |