Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650135 | Measurement chuck having piezoelectric elements and method | Karl Mautz, Alain Charles | 2003-11-18 |
| 6620563 | Lithography method for forming semiconductor devices on a wafer utilizing atomic force microscopy | Alain Charles, Karl Mautz | 2003-09-16 |
| 6589099 | Method for chemical mechanical polishing (CMP) with altering the concentration of oxidizing agent in slurry | David Weston Haggart, Jr., Karl Mautz | 2003-07-08 |