Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638880 | Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device | Mikio Yamamuka, Takaaki Kawahara, Masayoshi Tarutani, Shigeru Matsuno, Takehiko Sato | 2003-10-28 |
| 6563182 | Semiconductor device and manufacturing method thereof | — | 2003-05-13 |
| 6512885 | Liquid raw material vaporizer, semiconductor device and method of manufacturing semiconductor device | Mikio Yamamuka, Takaaki Kawahara, Masayoshi Tarutani | 2003-01-28 |