Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638880 | Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device | Mikio Yamamuka, Takaaki Kawahara, Masayoshi Tarutani, Tsuyoshi Horikawa, Shigeru Matsuno | 2003-10-28 |
| 6512297 | CVD source material for forming an electrode, and electrode and wiring film for capacitor formed therefrom | Shigeru Matsuno, Fusaoki Uchikawa, Akira Yamada | 2003-01-28 |