Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643430 | Temperature control system for a grating | Sadayuki Matsumoto, Takuya Ohira, Masakazu Takabayashi, Kiichi Yoshiara, Hajime Takeya +1 more | 2003-11-04 |
| 6638880 | Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device | Mikio Yamamuka, Takaaki Kawahara, Masayoshi Tarutani, Tsuyoshi Horikawa, Takehiko Sato | 2003-10-28 |
| 6512297 | CVD source material for forming an electrode, and electrode and wiring film for capacitor formed therefrom | Fusaoki Uchikawa, Takehiko Sato, Akira Yamada | 2003-01-28 |