Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645859 | Semiconductor device and manufacturing method thereof | Mahito Sawada, Hiroshi Tobimatsu, Yuuki Kamiura, Kouji Shibata, Hiroyuki Kawata | 2003-11-11 |
| 6607992 | Antireflection coating and semiconductor device manufacturing method | Kouichirou Tsujita, Atsumi Yamaguchi, Junjiro Sakai, Koichiro Narimatsu | 2003-08-19 |
| 6544904 | Method of manufacturing semiconductor device | Yuuki Kamiura, Hiroshi Tobimatsu, Mahito Sawada, Koji Shibata, Hiroyuki Kawata | 2003-04-08 |