Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607992 | Antireflection coating and semiconductor device manufacturing method | Atsumi Yamaguchi, Junjiro Sakai, Kouji Oda, Koichiro Narimatsu | 2003-08-19 |
| 6518196 | Method of manufacturing semiconductor device | Tetsuya Yamada, Atsumi Yamaguchi | 2003-02-11 |