Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645859 | Semiconductor device and manufacturing method thereof | Hiroshi Tobimatsu, Kouji Oda, Yuuki Kamiura, Kouji Shibata, Hiroyuki Kawata | 2003-11-11 |
| 6579787 | Semiconductor device with a fluorinated silicate glass film as an interlayer metal dielectric film, and manufacturing method thereof | Seiji Okura, Koji Oda | 2003-06-17 |
| 6544904 | Method of manufacturing semiconductor device | Yuuki Kamiura, Hiroshi Tobimatsu, Kouji Oda, Koji Shibata, Hiroyuki Kawata | 2003-04-08 |