Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652646 | Process for growing a silicon crystal segment substantially free from agglomerated intrinsic point defects which allows for variability in the process conditions | Vladimir V. Voronkov, Paolo Mutti | 2003-11-25 |
| 6638357 | Method for revealing agglomerated intrinsic point defects in semiconductor crystals | Luciano Mule'Stagno | 2003-10-28 |
| 6605150 | Low defect density regions of self-interstitial dominated silicon | Joseph C. Holzer | 2003-08-12 |
| 6586068 | Ideal oxygen precipitating silicon wafer having an asymmetrical vacancy concentration profile and a process for the preparation thereof | Marco Cornara, Daniela Gambaro, Massimiliano Olmo | 2003-07-01 |
| 6579779 | Process for the preparation of an ideal oxygen precipitating silicon wafer having an asymmetrical vacancy concentration profile capable of forming an enhanced denuded zone | — | 2003-06-17 |
| 6565649 | Epitaxial wafer substantially free of grown-in defects | Luciano Mule′Stagno, Lu Fei, Joseph C. Holzer, Harold W. Korb | 2003-05-20 |
| 6562123 | Process for growing defect-free silicon wherein the grown silicon is cooled in a separate chamber | Harold W. Korb | 2003-05-13 |
| 6537368 | Ideal oxygen precipitating epitaxial silicon wafers and oxygen out-diffusion-less process therefor | Marco Cornara, Daniela Gambaro, Massimiliano Olmo | 2003-03-25 |