Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565649 | Epitaxial wafer substantially free of grown-in defects | Luciano Mule′Stagno, Lu Fei, Joseph C. Holzer, Robert J. Falster | 2003-05-20 |
| 6562123 | Process for growing defect-free silicon wherein the grown silicon is cooled in a separate chamber | Robert J. Falster | 2003-05-13 |