Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586068 | Ideal oxygen precipitating silicon wafer having an asymmetrical vacancy concentration profile and a process for the preparation thereof | Robert J. Falster, Marco Cornara, Daniela Gambaro | 2003-07-01 |
| 6555194 | Process for producing low defect density, ideal oxygen precipitating silicon | Robert Falster, Joseph C. Holzer, Marco Cornara, Daniela Gambaro, Steve A. Markgraf +3 more | 2003-04-29 |
| 6537368 | Ideal oxygen precipitating epitaxial silicon wafers and oxygen out-diffusion-less process therefor | Robert J. Falster, Marco Cornara, Daniela Gambaro | 2003-03-25 |