Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583064 | Low contamination high density plasma etch chambers and methods for making the same | Robert A. Maraschin, William S. Kennedy | 2003-06-24 |
| 6583572 | Inductive plasma processor including current sensor for plasma excitation coil | Robert Veltrop, Jian J. Chen | 2003-06-24 |
| 6527912 | Stacked RF excitation coil for inductive plasma processor | Jian J. Chen, Robert Veltrop | 2003-03-04 |