Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583572 | Inductive plasma processor including current sensor for plasma excitation coil | Jian J. Chen, Thomas E. Wicker | 2003-06-24 |
| 6527912 | Stacked RF excitation coil for inductive plasma processor | Jian J. Chen, Thomas E. Wicker | 2003-03-04 |