Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583064 | Low contamination high density plasma etch chambers and methods for making the same | Thomas E. Wicker, Robert A. Maraschin | 2003-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583064 | Low contamination high density plasma etch chambers and methods for making the same | Thomas E. Wicker, Robert A. Maraschin | 2003-06-24 |