Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642063 | Apparatus for characterization of microelectronic feature quality | Albert Lamm, Mike Whelan, Andrew Weeks Kueny | 2003-11-04 |
| 6582619 | Methods and apparatuses for trench depth detection and control | — | 2003-06-24 |
| 6542835 | Data collection methods and apparatus | — | 2003-04-01 |