Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6540840 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa, Yoichi Kanno +3 more | 2003-04-01 |
| 6517635 | Liquid feed nozzle, wet treatment apparatus and wet treatment method | Kenichi Mitsumori, Yasuhiko Kasama, Akira Abe, Oh Eui Yeol, Tadahiro Ohmi +1 more | 2003-02-11 |