Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6540840 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Masaki Kusuhara, Masaru Umeda, Mitsuru Fukagawa, Yoichi Kanno +3 more | 2003-04-01 |