Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563218 | Semiconductor device of multi-wiring structure and method of manufacturing the same | Noriaki Matsunaga, Kazuyuki Higashi, Hideki Shibata | 2003-05-13 |
| 6534870 | Apparatus and method for manufacturing a semiconductor device | Noriaki Matsunaga, Hideki Shibata, Rempei Nakata, Hideshi Miyajima, Motonobu Kawai | 2003-03-18 |