Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593250 | Fabrication method of semiconductor device using low-k film | — | 2003-07-15 |
| 6563218 | Semiconductor device of multi-wiring structure and method of manufacturing the same | Noriaki Matsunaga, Yoshiaki Shimooka, Hideki Shibata | 2003-05-13 |
| 6555925 | Semiconductor device and producing method thereof | Noriaki Matsunaga, Akihiro Kajita, Tamao Takase, Hisashi Kaneko, Hideki Shibata | 2003-04-29 |
| 6541861 | Semiconductor device manufacturing method including forming step of SOI structure and semiconductor device having SOI structure | Tamao Takase, Hideki Shibata | 2003-04-01 |
| 6515365 | Semiconductor device having a ground plane and manufacturing method thereof | Noriaki Matsunaga | 2003-02-04 |