Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563218 | Semiconductor device of multi-wiring structure and method of manufacturing the same | Noriaki Matsunaga, Yoshiaki Shimooka, Kazuyuki Higashi | 2003-05-13 |
| 6555925 | Semiconductor device and producing method thereof | Kazuyuki Higashi, Noriaki Matsunaga, Akihiro Kajita, Tamao Takase, Hisashi Kaneko | 2003-04-29 |
| 6541861 | Semiconductor device manufacturing method including forming step of SOI structure and semiconductor device having SOI structure | Kazuyuki Higashi, Tamao Takase | 2003-04-01 |
| 6534870 | Apparatus and method for manufacturing a semiconductor device | Yoshiaki Shimooka, Noriaki Matsunaga, Rempei Nakata, Hideshi Miyajima, Motonobu Kawai | 2003-03-18 |