Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656284 | Semiconductor device manufacturing apparatus having rotatable gas injector and thin film deposition method using the same | Kyung-Sik Shim, Chang-Soo Park | 2003-12-02 |
| 6634314 | Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors | Kyung-Sik Shim | 2003-10-21 |
| 6565655 | High vacuum apparatus for fabricating semiconductor device and method for forming epitaxial layer using the same | Sung-Ryul Kim, Jae-Kyun Park | 2003-05-20 |
| 6530993 | Cluster tool for fabricating semiconductor device | Sung-Weon Lee | 2003-03-11 |
| 6524430 | Apparatus for fabricating a semiconductor device | Kyung-Sik Shim | 2003-02-25 |
| 6514837 | High density plasma chemical vapor deposition apparatus and gap filling method using the same | Young Suk Lee | 2003-02-04 |