Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565655 | High vacuum apparatus for fabricating semiconductor device and method for forming epitaxial layer using the same | Chul-Ju Hwang, Sung-Ryul Kim | 2003-05-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565655 | High vacuum apparatus for fabricating semiconductor device and method for forming epitaxial layer using the same | Chul-Ju Hwang, Sung-Ryul Kim | 2003-05-20 |