Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660095 | Single wafer LPCVD apparatus | — | 2003-12-09 |
| 6656284 | Semiconductor device manufacturing apparatus having rotatable gas injector and thin film deposition method using the same | Chul-Ju Hwang, Chang-Soo Park | 2003-12-02 |
| 6634314 | Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors | Chul-Ju Hwang | 2003-10-21 |
| 6524430 | Apparatus for fabricating a semiconductor device | Chul-Ju Hwang | 2003-02-25 |