Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623907 | Radiation-sensitive resin composition | Jun Numata, Aki Suzuki, Hiromichi Hara, Norihiro Natsume, Kiyoshi Murata +3 more | 2003-09-23 |
| 6531260 | Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition | Haruo Iwasawa, Akihiro Hayashi, Satoru Nishiyama | 2003-03-11 |
| 6517992 | N-sulfonyloxyimide compound and radiation-sensitive resin composition using the same | Yong Wang, Eiichi Kobayashi, Masaaki Miyaji, Jun Numata | 2003-02-11 |