Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6531260 | Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition | Haruo Iwasawa, Tsutomu Shimokawa, Akihiro Hayashi | 2003-03-11 |